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Semiconductor Industry

Semiconductor Industry
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Wafer ASRS
Reduce labor costs, equipment can get higher utilization. Strengthen the overall efficiency of goods management. -
Clean Room Stocker
1. High-precision. 2. Reliable and predictable performance. 3. Wafer transfer can be transferred in a clean and controlled environment. -
65 Tons AGV
1. Clean room level. 2. Can move forward/backward/transversely/obliquely/turn in place. 3. Self-developed battery. 4. Obstacle detection system. -
Clean Room AGV (Mobile Robot)
1. High-precision. 2. High recognition ability and positioning accuracy. 3. Optimization of efficiency. -
Semiconductor Wafer Lifter
1. Built-in hardware and security lock. 2. Flexible arrangement of components such as robot and track system. 3. Dust-free. -
Wafer Lifter (EFEM)
There are 2 ports, 3 ports and 4 ports for different needs.
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