Home » Applications » Semiconductor Industry
Semiconductor Industry
![](../up/20230524085230538652.jpg)
Semiconductor Industry
-
Wafer ASRS
Reduce labor costs, equipment can get higher utilization. Strengthen the overall efficiency of goods management. -
Clean Room Stocker
1. High-precision. 2. Reliable and predictable performance. 3. Wafer transfer can be transferred in a clean and controlled environment. -
65 Tons AGV
1. Clean room level. 2. Can move forward/backward/transversely/obliquely/turn in place. 3. Self-developed battery. 4. Obstacle detection system. -
Clean Room AGV (Mobile Robot)
1. High-precision. 2. High recognition ability and positioning accuracy. 3. Optimization of efficiency. -
Semiconductor Wafer Lifter
1. Built-in hardware and security lock. 2. Flexible arrangement of components such as robot and track system. 3. Dust-free. -
Wafer Lifter (EFEM)
There are 2 ports, 3 ports and 4 ports for different needs. -
Overhead Hoist Transfer(OHT)
Thinness, flexible gripper, 180 degrees rotation, 5G wireless transmission, conveying distance and track path can be designed according to cleanroom space. -
FOUP ASRS
Automatic storage and retrieval, return of empty boxes to storage upon retrieval completion, with 3,330 rack slots (each slot holds 2 boxes of 300 mm FOUP).
Website MapCopyright © 2018 KENMEC MECHANICAL ENGINEERING CO.,LTD. All rights reserved.