Semiconductor Integrated Equipment
[SMART] is the product positioning concept of Kenmec in the semiconductor industry. SMART implies the software architecture of the IOT IoT, which collects the underlying information of physical devices systematically and efficiently as a decision analysis for equipment maintenance, optimal production scheduling and forecasting. S represents the direct materials produced such as Si, GaAs, Sapphire, Glass, Sic, etc.; M stands for indirect materials such as Quarts, Target, Ceramic, etc.; A stands for Access access, such as EFEM, Load, Unload, can be customized with the process Equipment, such as our 3D measurement equipment with TSMC; Room represents storage, such as ASRS automatic warehouse for use in clean rooms, and Stocker and E-Rack for use in clean rooms; T stands for transportation, including Lifter, Conveyor, OHCV, OHT, RGV, AGV. Provide intelligent and unmanned solutions through virtual integration of SMART architecture.
This plan includes automation of wafer pick-and-place, transport, and storage. Compared to other industries, wafers are more demanding in terms of processing. In response to this demand, Kenmec is highly concerned with the transportation and storage of wafers in the field of semiconductor automation, especially in the storage environment, which must meet the high-level dust-free requirements.
This set of plans maximizes wafer yield. Through the automation of the basic transportation process, the overall production and product control process is further improved, indirectly to maximize production capacity.
- Project Video